JPH0356343B2 - - Google Patents

Info

Publication number
JPH0356343B2
JPH0356343B2 JP24435686A JP24435686A JPH0356343B2 JP H0356343 B2 JPH0356343 B2 JP H0356343B2 JP 24435686 A JP24435686 A JP 24435686A JP 24435686 A JP24435686 A JP 24435686A JP H0356343 B2 JPH0356343 B2 JP H0356343B2
Authority
JP
Japan
Prior art keywords
electrostrictive element
main body
lever member
valve body
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP24435686A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63101588A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP24435686A priority Critical patent/JPS63101588A/ja
Publication of JPS63101588A publication Critical patent/JPS63101588A/ja
Publication of JPH0356343B2 publication Critical patent/JPH0356343B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
JP24435686A 1986-10-15 1986-10-15 電歪素子を用いたアクチュエータの組立方法 Granted JPS63101588A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24435686A JPS63101588A (ja) 1986-10-15 1986-10-15 電歪素子を用いたアクチュエータの組立方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24435686A JPS63101588A (ja) 1986-10-15 1986-10-15 電歪素子を用いたアクチュエータの組立方法

Publications (2)

Publication Number Publication Date
JPS63101588A JPS63101588A (ja) 1988-05-06
JPH0356343B2 true JPH0356343B2 (en]) 1991-08-28

Family

ID=17117479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24435686A Granted JPS63101588A (ja) 1986-10-15 1986-10-15 電歪素子を用いたアクチュエータの組立方法

Country Status (1)

Country Link
JP (1) JPS63101588A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT397700B (de) * 1991-12-11 1994-06-27 Hoerbiger Fluidtechnik Gmbh Piezo-ventil
DE4320909C1 (de) * 1993-06-18 1994-06-01 Siemens Ag Servoventil
EP1158182B1 (de) * 2000-05-25 2004-12-08 FESTO AG & Co Ventileinrichtung
JP4555129B2 (ja) * 2005-03-10 2010-09-29 株式会社ダイシン 流路切替ユニット、吸着保持ユニット、気圧作動ユニット及び部品搬送装置
KR101301487B1 (ko) * 2011-06-07 2013-08-29 경원산업 주식회사 압전 밸브

Also Published As

Publication number Publication date
JPS63101588A (ja) 1988-05-06

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