JPH0356343B2 - - Google Patents
Info
- Publication number
- JPH0356343B2 JPH0356343B2 JP24435686A JP24435686A JPH0356343B2 JP H0356343 B2 JPH0356343 B2 JP H0356343B2 JP 24435686 A JP24435686 A JP 24435686A JP 24435686 A JP24435686 A JP 24435686A JP H0356343 B2 JPH0356343 B2 JP H0356343B2
- Authority
- JP
- Japan
- Prior art keywords
- electrostrictive element
- main body
- lever member
- valve body
- actuator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 18
- 238000006073 displacement reaction Methods 0.000 claims description 16
- 239000012530 fluid Substances 0.000 description 28
- 239000004020 conductor Substances 0.000 description 9
- 238000005219 brazing Methods 0.000 description 8
- 239000000919 ceramic Substances 0.000 description 5
- 230000008602 contraction Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Landscapes
- Electrically Driven Valve-Operating Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24435686A JPS63101588A (ja) | 1986-10-15 | 1986-10-15 | 電歪素子を用いたアクチュエータの組立方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24435686A JPS63101588A (ja) | 1986-10-15 | 1986-10-15 | 電歪素子を用いたアクチュエータの組立方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63101588A JPS63101588A (ja) | 1988-05-06 |
JPH0356343B2 true JPH0356343B2 (en]) | 1991-08-28 |
Family
ID=17117479
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24435686A Granted JPS63101588A (ja) | 1986-10-15 | 1986-10-15 | 電歪素子を用いたアクチュエータの組立方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63101588A (en]) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AT397700B (de) * | 1991-12-11 | 1994-06-27 | Hoerbiger Fluidtechnik Gmbh | Piezo-ventil |
DE4320909C1 (de) * | 1993-06-18 | 1994-06-01 | Siemens Ag | Servoventil |
EP1158182B1 (de) * | 2000-05-25 | 2004-12-08 | FESTO AG & Co | Ventileinrichtung |
JP4555129B2 (ja) * | 2005-03-10 | 2010-09-29 | 株式会社ダイシン | 流路切替ユニット、吸着保持ユニット、気圧作動ユニット及び部品搬送装置 |
KR101301487B1 (ko) * | 2011-06-07 | 2013-08-29 | 경원산업 주식회사 | 압전 밸브 |
-
1986
- 1986-10-15 JP JP24435686A patent/JPS63101588A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS63101588A (ja) | 1988-05-06 |
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